OPTICAL READ TYPE RADIATION-DISPLACEMENT TRANSDUCING DEVICE, VIDEOIZING DEVICE USING SAME, AND METHOD FOR DISPLACEMENT DETECTION

摘要

PROBLEM TO BE SOLVED: To detect radiation with high sensitivity without requiring any half- mirror part. SOLUTION: Beltlike movable reflection parts 18 and fixed reflection parts 19 which are arranged by turns substantially form a reflection type diffraction grating. The movable reflection parts 18 are fixed to a displacement part 13. The fixed reflection parts 19 are fixed to a substrate 10. The displacement part 13 bends upward with the heat that a radiation absorption part 15 generates by receiving infrared rays (i). Consequently, the quantity of the step between the movable reflection parts 18 and fixed reflection parts 19 varies. Readout light (j) irradiating the reflection parts 18 and 19 is reflected by the reflection parts 18 and 19. The intensity of reflected light of each diffraction degree depends upon the mentioned step quantity, so it indicates the quantity of the incident infrared rays.