| 摘要 |
There is provided a method for fabricating a semiconductor device in which a plurality of adjacent contacts are formed on a plurality of regions having the same layout. The layout is divided into at least two groups, and the contacts are formed on the regions by using masks which are designed to have different sizes from each other by the group. By differentiating the mask sizing factor of the contact pattern by the group on the mask, it is possible to minimize the problem that the contact is not opened at the region where a global step difference on a wafer is significant and to enhance a process margin of photolithography.
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