发明名称 MARKED SEMICONDUCTOR WAFER FOR MARKET
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor wafer whose marking does not exert bad influence upon itself in the middle of manufacture and which is hardly influenced by the surface treatment applied in each process of manufacture of itself. SOLUTION: A wafer is made into a wafer fitted with a very small ID mark which makes a plurality of very small ID marks A1 and A2 function as backup with each other by giving it a plurality of very small ID marks A1 and A2. Hereby, the necessity of feeling anxiety about the confusion or disability of trace caused by the disappearance of an extremely small mark vanishes.
申请公布号 JP2001196281(A) 申请公布日期 2001.07.19
申请号 JP20000326082 申请日期 2000.10.25
申请人 KOMATSU ELECTRONIC METALS CO LTD 发明人 KITAGAWA SATORU
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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