| 摘要 |
PROBLEM TO BE SOLVED: To chuck and hold an LCD substrate with high surface accuracy even when it is in any state and to receive and deliver an LCD substrate without affecting the substrate. SOLUTION: When an inspected LCD substrate 2 is contained in a cassette after the LCD substrate 2 is inspected, air is blown from a first groove 3 to break vacuum chucking to a chuck plate 1 from the center of the substrate 2, then the air is blown from a second groove 4 to break the vacuum chucking from the periphery of the substrate 2.
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