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发明名称
Verfahren zur Untersuchung einer Oberflächenschicht
摘要
申请公布号
DE19753790(C2)
申请公布日期
2001.07.19
申请号
DE19971053790
申请日期
1997.12.04
申请人
MICRONAS GMBH
发明人
WOLF, BERNHARD;GAHLE, HANS-JUERGEN;IGEL, GUENTER;BAUMANN, WERNER;EHRET, RALF;LEHMANN, MIRKO
分类号
G01B11/30;G01N21/94;H01L21/66;(IPC1-7):G01N33/00;G01N33/483;G01N27/327;G06T7/00
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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