发明名称 IMPROVED DRY FILM PHOTORESIST
摘要 PROBLEM TO BE SOLVED: To provide a tack-free dry film photoresist having a reduced cold flow and an improved dry film structure. SOLUTION: The dry film photoresist has a glass transition temperature above room temperature, contains a crosslinking agent having a weight average molecular weight of at least about 500D, has an improved cold flow and has been disposed by coating on a polyethylene terephthalate support.
申请公布号 JP2001194778(A) 申请公布日期 2001.07.19
申请号 JP20000337139 申请日期 2000.11.06
申请人 SHIPLEY CO LLC 发明人 SHELNUT JAMES G
分类号 G03F7/004;G03F7/027;G03F7/16;H05K3/00 主分类号 G03F7/004
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