| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an EL element which restrains the decline of luminance efficiently. SOLUTION: An EL element is composed of the films formed in the sequence of a lower electrode layer 2 made of ATO on a transparent substrate 1 made of glass or the like, a lower insulation layer 3 made of ATO composed of very thin films of Al2O3 and TiO2 laminated alternately, a luminous layer 4 composed of ZnS, Mn, an upper insulation layer made of ATO, and an upper electrode layer made of ITO. The manufacturing stage is divided into the first period starting from the formation of the lower insulation layer ending before the formation of the luminous layer 4, and the second period starting from the formation of the luminous layer 4 ending before the formation of the upper insulation layer, and the third period after the formation of the upper insulation layer. During at least one period out of above periods, ultraviolet rays are applied by a low pressure mercury lamp 8 on the upper side of one surface of the transparent substrate 1.
|
