CERAMIC HEATER AND SUPPORT PIN

摘要

A ceramic heater having an advantage that the distance between a semiconductor wafer and the heating surface of a ceramic base can be maintained constant, the semiconductor wafer can be heated at even temperature, pollution of the semiconductor wafer is prevented, and no support pins come off. The ceramic heater having a ceramic base on or in which a heater is provided is characterized in that the semiconductor wafer is spaced from the surface of the ceramic base and heated.