| 摘要 |
PROBLEM TO BE SOLVED: To efficiently deposit high-accuracy recording layers, etc., on disk substrates by expelling the sputter flakes peeled from mask members. SOLUTION: Mounting of the disk substrates 2 to be carried into and out of a deposition device with respect to the holder section 13 of the pallet 11 and taking out of the disk substrates 2 formed with the recording parts 5, etc., are carried out by a handling device 20. The handling device 20 mounts the disk substrates 2 by a mounting head 22 to holder sections 13 by means of the mask members 16 and 17 and removes the sputter flakes 19, etc., sticking to the disk substrates 2 by executing air flow to the disk substrates by a cleaning head 23. The disk substrates 2 are subjected to film making of the recording parts 5, etc., in this state.
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