| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive stepped shape measuring apparatus capable of measuring a stepped shape in a short time. SOLUTION: The stepped shape measuring apparatus includes a light source 2, an illuminating optical system 60 for applying light from the light source 2 to a sample surface 5a having a stepped shape, a detector 55 for detecting the light reflected by the sample surface 5a, and a signal processing circuit 56 for calculating a difference in height of the stepped shape according to the movement of an image-forming position on the light-receiving surface 55a of the detector 55. The apparatus is provided with a pattern-projecting slit 62 disposed in a conjugate position with respect to the sample surface 5a in the illuminating optical system 60, a movable mirror 63 disposed on the optical path of the illuminating optical system 60 for scanning the light passing through the slit 62, and a light blocking plate 53 for blocking half of the light passing through the slit 62. A two-dimensional photocell for detecting an image of the slit 62 scanned is provided as the detector 55.
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