MICRO ACTUATOR WITH OPTIMISED DEFORMABLE STRUCTURE FOR DISC STORAGE AND METHOD FOR MAKING SAME

摘要

The invention concerns a deformable micro actuator with electrostatic motor for disc storage. Said microactuator located between the head and the suspension, consists of vertical electrodes (503, 504, 505) alternately maintained by an upper rigid horizontal plane (502), and a lower rigid horizontal plane (501), the horizontal planes being linked by a deformable peripheral elastomer membrane (500). The invention is useful for following narrow tracks for hard disc storage.