METHOD FOR MANUFACTURING INFRARED SENSING PART OF THERMAL INFRARED SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a new method for manufacturing an infrared sensing part for a thermal infrared sensor which has high mass-productivity and lowers cost without sacrificing sensitivity characteristics although a thermal infrared sensor which has high sensitivity and high mass-productivity and is low-cost can not be manufactured by a conventional manufacturing method. SOLUTION: The infrared sensing part is formed of an inorganic infrared-ray absorbing layer with about 50% infrared-ray absorptivity, a nonreflective coating layer, and an infrared-ray reflecting layer.