| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type displacement sensor having a sensor head with a head surface made smaller without causing an increase in parasitic capacity. SOLUTION: The sensor head 1 comprises a sensor electrode 2 and a ring- shaped reference electrode 3 surrounding it. The sensor electrode 2 has a proximal end portion 11 to which AC signal are directly supplied and a tip portion 12 disposed on the proximal end portion 11 through a conical dielectric column 13 and being smaller in diameter than the proximal end portion 11. The reference electrode 3 has a proximal end portion 14 disposed in the form of a ring at approximately the same planar position as the proximal end portion 11 in such a manner as to surround the proximal end portion 11, and a tip portion 15 disposed on the proximal end portion 14 through a hollow conical dielectric hone 16 and being smaller in diameter than the proximal end portion 14.
|
