| 摘要 |
PROBLEM TO BE SOLVED: To prevent a lens from being distorted by rectangular illuminating light. SOLUTION: Specially, an optical device, which is a microlithography projection printing device, has a slot-shaped image field or a rotation asymmetrical illumination. Accordingly, an optical member 1 undergoes a rotation asymmetrical action by radiation light from a light source. Compensation light feeding units 11 and 14 to 19 are optically coupled with the member 1 via the peripheral edge surface 13 of the number 1. The units 11 and 14 to 19 feed compensation lights 16 and 12 to the member 1 so that the temperature distribution, which is generated by a heating of the member 1 due to projected light 2 and the compensation light 12, of the member 1 is made uniform at least partially. An image-formation defect caused by the projected light is corrected. |
