| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor in which the breakdown strength of a diaphragm is enhanced without increasing the thickness of an insulator for the diaphragm and to provide its manufacturing method. SOLUTION: A hollow part 7 is formed in a part of a substrate 1. A lower- part membrane 8, heaters 3 and thermometeric bodies 5 and fluid thermometers 4 which are constituted of a membrane as well as an upper-part membrane 9 and a reinforcement membrane 10 are laminated in this order on the side of the surface 1a of the substrate 1. The laminated membranes form the diaphragm 2 on the hollow part 7, That is to say, the reinforcement membrane 10 forms the outermost layer on the side of the surface in the diaphragm 2.
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