| 摘要 |
PROBLEM TO BE SOLVED: To obtain a measuring cell sufficiently small in the cross-sectional area of the flow channel thereof, capable of certainly holding airtightness, having a chemically stable measuring chamber and high in measuring sensitivity. SOLUTION: A measuring cell is constituted by bonding glass substrates 1, 2 and a flow channel groove 6 is formed in the bonding surface of the glass substrate 1 by photofabrication technique and wet etching technique and through- holes 9, 10 for introducing and discharging a liquid sample are formed in the glass substrate 2 and an optically opaque Si film 3 is formed in the bonding surface as a slit by a sputtering method. Further, the bonding surface of the glass substrates 1, 2 and the inner surface of the flow channel groove 6 are covered with SiO2 films 4, 5 formed by a sputtering method and a fluoric acid aqueous solution is interposed between the glass substrates 1, 2 to bond the substrates. |
