| 摘要 |
An apparatus main body has a surface plate, a vertical shaft and an arm coupled to the vertical shaft such that it can move in the vertical direction. A spline shaft is attached to the arm such that it can move in the vertical direction. A keeper for holding a workpiece is attached to the lower end of the spline shaft. To the arm, attached are: reference position sensor for detecting the position of the top surface of a reference base as a reference position; and a workpiece thickness sensor for detecting the position of the top surface of the keeper as a position associated with the thickness of the workpiece. During a process on the workpiece, the absolute thickness of the workpiece is recognized based on information detected by the sensors, and the processing operation is controlled such that the thickness will become a desired value. |
