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发明名称
Verfahren zur Herstellung von feinen kugelförmigen Yttriumoxidteilchen
摘要
申请公布号
DE69703925(T2)
申请公布日期
2001.07.19
申请号
DE19976003925T
申请日期
1997.11.13
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
WATAYA, KAZUHIRO;SAKAI, SHIGERU
分类号
C01F17/00;C09K11/02;(IPC1-7):C01F17/00
主分类号
C01F17/00
代理机构
代理人
主权项
地址
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