ANTENNA INTEGRATED ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a ground electrode configuration capable of being produced by a simple process, easily entering light and being effectively operated as a ground surface in an antenna integrated element in which an optical signal is entered from the backside of a substrate. SOLUTION: A backside entering type photodetector 3 and a planar antenna 2 electrically connected to the photodector 3 are formed on the front surface of the substrate 1, and a reticulated ground electrode 5 is formed on the backside of the substrate 1.