发明名称 Digital scanning measurement unit, e.g. scanning tunnel microscope; has differential element, analogue to digital converter and computer to form absolute image signal values from difference signals
摘要 The unit has a detector (12) that scans the surface (10) in rows. A differential element (14) is connected between the detector output and an analogue to digital converter (16), which is connected to a computer device (18). The computer device reconstructs absolute output values from the digital difference signals to generate the image signal. An output device (20) for the image data is connected to the computer device output.
申请公布号 DE19961906(A1) 申请公布日期 2001.07.19
申请号 DE1999161906 申请日期 1999.12.20
申请人 FORSCHUNGSZENTRUM JUELICH GMBH 发明人 TESKE, MARTIN
分类号 B82B1/00;G01Q30/04;G01Q60/10;H01J3/14;H01J5/16;H01J37/28;(IPC1-7):G12B21/20;G12B21/04 主分类号 B82B1/00
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