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发明名称
ENVIRONMENT EXCHANGE CONTROL FOR MATERIAL ON A WAFER SURFACE
摘要
申请公布号
EP1116074(A1)
申请公布日期
2001.07.18
申请号
EP19990946708
申请日期
1999.09.01
申请人
SILICON VALLEY GROUP, INC.
发明人
GURER, EMIR;LEE, ED, C.;ZHONG, TOM;REYNOLDS, REESE;GOLDEN, KEVIN;LEWELLEN, JOHN, W.;WACKERMAN, SCOTT, C.
分类号
G03F7/039;G03F7/16;G03F7/20;G03F7/26;G03F7/38;H01L21/027;(IPC1-7):G03F7/16;G03F7/004
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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