发明名称 METHOD OF PRODUCING COMPOUND SEMICONDUCTOR SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method producing a compound semiconductor single crystal, which comprises growing a crystal by gradually solidifying in the vertical direction from the surface of a melt without using a seed crystal and by which the single crystal free from a polycrystal and a twin crystal can be produced with a good yield. SOLUTION: In a method of growing a compound semiconductor single crystal, which comprises charging a raw material of the compound semiconductor into a crucible, then arranging the crucible in a vertical heating furnace, heating the raw material by a heater to melt the raw material, and gradually solidifying it from the surface of the melt of the raw material without using a seed crystal, a portion of the raw material is allowed to remain in the solid state in the melt of the raw material so as to cause the formation of a nucleus at the surface of the melt of the raw material and to grow a crystal starting from the nucleus, thereby, the melt is prevented from becoming supercooled stat and generating the polycrystal and twin crystal.
申请公布号 JP2001192289(A) 申请公布日期 2001.07.17
申请号 JP20000001675 申请日期 2000.01.07
申请人 JAPAN ENERGY CORP 发明人 FUJIMURA SHIGETO;ASAHI TOSHIAKI;SATO KENJI
分类号 H01L21/208;C30B11/00;C30B11/04;C30B11/14;(IPC1-7):C30B11/00 主分类号 H01L21/208
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