| 摘要 |
PROBLEM TO BE SOLVED: To develop a device for moving members, which is capable of rapidly and precisely being moved to the inside and the outside of a single crystal pulling-up machine while exactly holding a main chamber and which has a function capable of moving the members in the furnace by previously simplifying attaching of tools for treating the members at the inside of the furnace and to provide the device for moving members of the single crystal pulling-up machine, which is capable of securing safety of a worker, improving the reliability in the work and saving man power, when the large-sized and highly heavy main chamber of the single crystal pulling-up machine and members in the furnace are disassembled or assembled. SOLUTION: This device for moving members is used when a single crystal pulling-up device based on a Czochralski method is disassembled or assembled and is constituted of at least a clamp part holding an upper flange of a cylindrical main chamber, a turning boom for attaching tools for treating members in a furnace and a turning boom moving mechanism for lifting/lowering and rotating the turning boom. The turning driving system of the turning boom mentioned above is a motor-driven system.
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