发明名称 COATING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a coating device capable of easily obtaining an excellently uniform thin film at a low cost. SOLUTION: A slit 114 is formed and a coating liquid discharging means 110 for discharging a coating liquid from the slit and a base material fixing means 130 for placing and fixing a base material are included. A par of the slit peripheral part in contact with the coating liquid at least on the outside surface of the coating liquid discharging means 110 is processed so that the contact angle to the coating liquid becomes <=20 deg.. The base material fixed by the base material fixing means is coated by moving the coating liquid discharging means relatively to the base material fixing means and discharging the coating liquid from the slit of the coating liquid discharging means.
申请公布号 JP2001191004(A) 申请公布日期 2001.07.17
申请号 JP20000006175 申请日期 2000.01.11
申请人 SONY CORP 发明人 KANAMARU SHOJI
分类号 B05C5/02;B05C11/00;(IPC1-7):B05C5/02 主分类号 B05C5/02
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