LIQUID SPRINKLING APPARATUS

摘要

PROBLEM TO BE SOLVED: To uniformly sprinkle a resist liquid or an etching liquid over a material to be processed without lowering productivity. SOLUTION: Roller conveyors 213 for passing a pallet 1 loading a work W through a liquid jet region while rotating the same are provided and the angle of the surface of the work W to liquid jet nozzles 6 is changed.