| 摘要 |
PROBLEM TO BE SOLVED: To shorten the time for treatment while having a sufficient effect of cracking and removing organic matter sticking to substrates, or the like. SOLUTION: This device includes scrubbing gas supply means 2 and 5 which set the oxygen partial pressure near the part to be scrubbed of an object K to be scrubbed under atmosphere pressure at a range of 20 Pa to 15 kPa, a UV light source 42 which irradiates the part to be scrubbed with UV rays and suction removing means 3 and 6 which suck and remove the scrubbing treatment gas used for scrubbing the part to be scrubbed from near the part to be scrubbed.
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