| 发明名称 |
Geometric aerial image simulation |
| 摘要 |
An aerial image produced by a mask having transmissive portions is simulated by dividing the transmissive portions of the mask into primitive elements, obtaining a response for each of the primitive elements, and then simulating the aerial image by combining the responses over all of the primitive elements.
|
| 申请公布号 |
US6263299(B1) |
申请公布日期 |
2001.07.17 |
| 申请号 |
US19990234422 |
申请日期 |
1999.01.19 |
| 申请人 |
LSI LOGIC CORPORATION |
发明人 |
ALESHIN STANISLAV V.;EGOROV EVGENIJ;BELOKOPITOV GENADIJ V.;PETRANOVIC DUSAN |
| 分类号 |
G03F7/20;(IPC1-7):G06G7/48 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
