SPUTTERING TARGET FOR DEPOSITING OPTICAL RECORDING PROTECTIVE FILM CAPABLE OF DIRECT CURRENT SPUTTERING

摘要

PROBLEM TO BE SOLVED: To provide a sputtering target for depositing an optical recording protective film consisting of a zinc chalcogenide-silicon dioxide-baron oxide system sintered body capable of d.c. sputtering. SOLUTION: This target has a composition containing silicon dioxide of 10 to 30 mol%, boron oxide of 0.5 to 30 mol%, and the balance zinc chalcogenide.