| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and a device for simultaneously obtaining plural process parameters with high frequency of monitoring using a single monitoring means. SOLUTION: In the method for measuring the process parameters in a material working process using high energy beams 2 focused on the working zone of a workpiece 8, laser beams by measuring light intensity in the zone of a steam capillary tube 14 produced by high energy beams 2 within the working zone on the same axis as the high energy radiation with an optical sensor 10 supplying to an evaluating means 18 a measured signal obtained as a result of scanning a picture field, the optical sensor 10 having a dynamic range exceeding 70 dB is used, and the measured signal of the picture field section showing at least the zone of the steam capillary tube 14 and the molten zone 20 enclosing the steam capillary tube 14 is simultaneously transmitted to the evaluating means 18.</p> |
