| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric pump arranged so that it can be used effectively irrespective of whether the fluid has insulating property. SOLUTION: An assembly 4 of piezoelectric element used in a piezoelectric element pump is to suck in a fluid and discharge by vibrating a vibrating plate 21 using a piezoelectric element 22, wherein the vibrating plate 21 is formed from an insulating material and the piezoelectric element 22 is affixed to the oversurface of the plate 21. A first electrode film 23 and a second electrode film are formed on the oversurface and undersurface of the element 22. The second electrode film is concealed between the undersurface of the element 22 and the oversurface of the plate 21, and only part of the film is exposed from the element 22 to serve as a terminal 25. The terminal 25 is folded back to the oversurface of the element 22, and a gap 26 is formed between the terminal 25 and the first electrode film 23 so that they are prevented from contacting with each other. |
