| 摘要 |
A rotary microactuator includes a stationary structure formed on a substrate, a movable structure, and at least a pair of wires connected to the movable structure that conduct a signal associated with the movable structure. Each wire of the pair of wires has a first end that is connected in a cantilever manner to the substrate and a second end that is connected to the movable structure. The wires each have a serpentine shape between the first end and the second end, a predetermined spring stiffness, and a predetermined electrical characteristic. The microactuator also includes a magnetic head slider that is attached to the movable structure, and at least another pair of wires conducting a signal associated with a magnetic head of the slider. Each of the another pair of wires has a first end that is connected in a cantilever manner to the substrate and a second end that is connected to the movable structure. Like the first pair of wires, each of the another pair of wires has a serpentine shape between the first end and the second end of the wire. Electronic circuitry for conditioning the electrical signals associated with the magnetic head can be fabricated as part of the substrate and be connected to one of the pair of wires. The electronic circuitry can, for example, amplify electrical drive signals associated with the magnetic head, be a recording sensor preamplifier, and/or provide ESD protection for the electrical signals associated with the magnetic head.
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