| 摘要 |
An apparatus for mechanically connecting modular chemical delivery substrate blocks in single layer and/or multiple lower layer configurations via axial and intermediate locations in such a way that all joint locations (including mounting fixtures to a rigid mechanism for mounting purposes) are completely accessible from the top surface of the assembly for fastening or unfastening the joints of the blocks. A design using the method of the present invention and incorporating current semiconductor standards (such as SEMI 2787) dictates specific mechanical dimensions and fastener localities in order to be properly implemented. Use of this top access fastener design results in minimal numbers of substrate joints in a chemical delivery system being affected when removing any one block from the system.
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