发明名称 Method and apparatus for creating a voltage threshold in a FET
摘要 A method of fabricating a field effect transistor including doping a continuous blanket layer in a semiconductor substrate structure adjacent the surface to include a source area and a drain area spaced from the source area. A high dielectric constant insulator layer is positioned on the surface of the semiconductor substrate structure overlying the continuous blanket layer to define a gate area between the source and drain areas. A gate contact on the insulator layer is selected to provide a work function difference that depletes the doped layer beneath the insulator layer. Further, the doped layer depth and dosage are designed such that the doped layer is depleted beneath the insulator layer by the selected work function difference of the gate contact and the semiconductor substrate.
申请公布号 US6262461(B1) 申请公布日期 2001.07.17
申请号 US19980102105 申请日期 1998.06.22
申请人 MOTOROLA, INC. 发明人 MARSHALL DANIEL S.;OOMS WILLIAM J.;HALLMARK JERALD A.;WANG YANG
分类号 H01L21/314;H01L21/336;H01L29/49;H01L29/51;H01L29/78;H01L31/119;(IPC1-7):H01L31/119 主分类号 H01L21/314
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