| 摘要 |
PROBLEM TO BE SOLVED: To provide a high density integration ink jet printer head of next generation by laying electromechanical conversion elements on a magnesium oxide single crystal substrate. SOLUTION: A magnesium oxide (magnesia) single crystal substrate 1 has a cubic system crystal structure and (100) face serves as a cleavage surface. Melting rate of the crystal for etching liquid is different in each direction of the substrate 1 and a reverse pyramidal cavity is formed by etching. When a single crystal substrate 1 having surface of (100) face is prepared and openings for stripe-like etching are made in the substrate 1 in the direction of about 45 deg. with respect to the (010) face orientation of the substrate, a stripe-like trench shape suitable for the liquid chamber of a high integration ink jet printer head can be formed. When the etching depth is controlled for the thickness of the substrate 1 by the etching time, a diaphragm part 3 of desired thickness is provided. The liquid chamber 2 may be formed not by etching but by mechanical cutting depending on the degree of integration of the head.
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