发明名称 |
Fast recovery diode and method for its manufacture |
摘要 |
A soft recovery diode is made by first implanting helium into the die to a location below the P/N junction and the implant annealed. An E-beam radiation process then is applied to the entire wafer and is also annealed. The diode then has very soft recovery characteristics without requiring heavy metal doping.
|
申请公布号 |
US6261874(B1) |
申请公布日期 |
2001.07.17 |
申请号 |
US20000593333 |
申请日期 |
2000.06.14 |
申请人 |
INTERNATIONAL RECTIFIER CORP. |
发明人 |
FRANCIS RICHARD;NG CHIU |
分类号 |
H01L21/322;H01L21/329;H01L29/861;(IPC1-7):H01L21/332 |
主分类号 |
H01L21/322 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|