| 摘要 |
A thin film magnetic head having a short magnetic path length by reducing a spacing between successive coil windings of a thin film coil to improve flux rising time, NLTS and overwrite characteristics, is efficiently manufactured on a mass scale by forming a write gap layer on a first magnetic layer having a pole portion of the thin film magnetic head opposing to a magnetic record medium, forming, on the write gap layer, a seed layer made of a material which can be easily removed by a reactive ion etching such as Ti-TiN, Mo, W, Al, Ti-TiW, MoSi2 and WSi2, forming coil windings of the thin film coil by electroplating a copper after forming a photoresist having coil-shaped openings formed therein, removing the photoresist, removing selectively the exposed seed layer by the reactive ion etching using a fluorine or chlorine gas, and covering the coil windings with a photoresist. After forming a second layer thin film coil in a similar manner, a second magnetic layer is formed in a given pattern, and then a whole surface is covered with an overcoat layer.
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