| 摘要 |
The invention relates to an illumination device for the strip-wise illumination of a flat article (BN). The inventive illumination device comprises a mirror system that is disposed symmetrically to an optical axis (OA) with respect to its diameter and that consists of a plurality of directly subsequent mirror segments (S1, S21, S22, S3). The inventive design of the mirror system in the form of mirror segments prevents undesired interferences through reflections and scattered light from being produced. It further reduces the dependence of the light intensity in the object plane of the distance of the article and allows a more compact design of the entire system. |
