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摘要
申请公布号
JP3189109(B2)
申请公布日期
2001.07.16
申请号
JP19930353451
申请日期
1993.12.28
申请人
发明人
分类号
H01L41/107;(IPC1-7):H01L41/107
主分类号
H01L41/107
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