| 摘要 |
PROBLEM TO BE SOLVED: To enhance the adhesion of a lateral lid, seal a conveying matter with clean vapor to transfer and store, and realize dropping prevention of an additional lid by a compact mechanism, by a method wherein a vacuum discharging inlet and outlet for vacuum-chucking the lateral lid is provided in a box main body and has a structure in which the inlet and outlet is closed by the additional lid. SOLUTION: In a clean box 30 which seals and accommodates a conveyed matter 15 with clean vapor, a chucking space S formed by airtightly covering a chucking annular groove 33 of a side face flange part 31a by a lateral lid 35 is decompressed in a vacuum. In such a state, the lateral lid 35 and an additional lid 36 airtightly close a side face opening 32 and an inlet and outlet 34 by an inner and outer pressure difference. For this reason, in this state, it becomes possible to convey and store freely. Further, as the additional lid 36 is urged to a direction of closing the inlet and outlet 34 by a coil spring 49 included in dropping preventing means 40, even if leak should occur in the chucking annular groove 33, the additional lid 36 does not fall off and the handling is facilitated. |
