| 摘要 |
PURPOSE:To prevent a movable electrode from sticking to a fixed electrode, and/or closely attaching thereto to the extent that it can not be separated in the cleaning and drying processes when an acceleration sensor is manufacture. CONSTITUTION:Each projected section 23 projected toward the movable electrode 27A side of a mass section 27 from the fixed electrode 22A side of each fixed section 22, is formed, and each projected section 28 projected out of the movable electrode 27A side of the mass section 27 toward the fixed electrode 22A side of each fixed section 22, is also formed. Even if there exist water between the fixed section 22 and the mass section 27, the respective projected sections 23 and 28 the tipe ends of which are pointed, are brought into contact with the mating surface of each electrode so as to allow a minute gas to be kept in between. The constitution allows water to run out of the minute gap, so that the movable electrode 27A is prevented from sticking to the fixed electrode 22A, and the mass section 27 is prevented from closely attaching to the fixed section 22 to the extent that it can not be separated in the drying process. |
