METHOD OF BURNING COMBUSTIBLE WASTE GAS FROM PLASMA CVD DEVICE, AND SYSTEM THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a technique which can save combustible material gas for kindling fire used in the combustion treatment of combustible waste gas discharged from a plasma CVD device. SOLUTION: In the combustion treatment method for combustible waste gas discharged from plasma CVD devices 1p, 1i, and 1n, a part of the waste gas is shunted 5 and supplied for kindling fire within a combustion treatment chamber 7, and the remainder 4 of the waste gas is combusted by the kindling fire within the combustion treatment chamber 7. When the waste gas from the plasma CVD device decreases or stops, separate combustible material gas H2 is replenished for use as kindling fire.