Apparatus for resetting process recipe used in semiconductor factory automation (PA) system has resetting block that resets process recipe in response to reset command inputted from operator if process recipe is not conformable

摘要

Retrieving block (1006) retrieves semiconductor measurement data contained in a trace file in response to a retrieval command inputted from an operator. Resetting block (1008) resets a process recipe in response to a reset command inputted from the operator if the process recipe is not conformable. The operator compares reference data with the retrieved semiconductor measurement data to determine whether the process recipe is conformable. Independent claims are included for: (a) a semiconductor factory automation system (b) a method for resetting a process recipe for factory automation system