| 摘要 |
<p>A linear drive assembly for moving a body associated with processing a substrate is disclosed. The linear drive assembly includes a first gear (152) and a second gear (154), which is operatively engaged with the first gear. The linear drive assembly further includes a positioning member (158) having a first portion (160) and a second portion (162). The first portion is movably coupled to the second gear in a linear direction, and the second portion is fixed to a component associated with processing a substrate.</p> |
