Fabrication method of solid electrolytic capacitor

摘要

A shaped member 1 having a predetermined configuration is formed by shaping powder of a valve metal under pressure (FIG. 1A), a sintered body 3 is formed by sintering the shaped member (FIG. 1B) and a pre-anodic oxidation film 9 is preliminarily formed on a surface of the sintered body 3 by electrochemical method (FIG. 1C) before a dielectric film 4 having a predetermined thickness is formed on the sintered body by anodic oxidation (FIG. 1D). The pre-anodic oxidation film 9 is formed by anodic oxidation or barrel chemical conversion to have a thickness larger than a thickness of an oxide film formed by natural oxidation (1 to 5 nm in a case of tantalum) and smaller than an oxide film 4.