| 发明名称 |
LINEAR DRIVE SYSTEM FOR USE IN A PLASMA PROCESSING SYSTEM |
| 摘要 |
A linear drive assembly for moving a body associated with processing a substrate is disclosed. The linear drive assembly includes a first gear (152) and a second gear (154), which is operatively engaged with the first gear. The linear drive assembly further includes a positioning member (158) having a first portion (160) and a second portion (162). The first portion is movably coupled to the second gear in a linear direction, and the second portion is fixed to a component associated with processing a substrate.
|
| 申请公布号 |
WO0150498(A1) |
申请公布日期 |
2001.07.12 |
| 申请号 |
WO2001US00057 |
申请日期 |
2001.01.02 |
| 申请人 |
LAM RESEARCH CORPORATION;HAO, FANGLI;DAWSON, KEITH |
发明人 |
HAO, FANGLI;DAWSON, KEITH |
| 分类号 |
H05H1/46;C23C16/509;H01J37/32;H01L21/205;H01L21/3065;(IPC1-7):H01J37/32 |
主分类号 |
H05H1/46 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
