| 摘要 |
PURPOSE: A Film forming apparatus is provided to completely remove fine fouling adherent to the discharge opening of a coating liquid discharging nozzle even when the opening is minute. CONSTITUTION: A cleaning block is installed freely vertically movably in the moving range of the nozzle(85). A cleaning space is formed on the upper surface of the block. An opened ejection port for the coating liquid is formed in the inside surface of the space, and an opened suction port for sucking air around the discharge opening(94) of the nozzle(85) is formed in the bottom surface of the space. A projection part which comes into contact with the nozzle plate(95) of the nozzle(85) during cleaning is formed on the upper surface of the block. In cleaning, the lower surface of the nozzle(85) is brought into contact with the upper surface of the block.
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