发明名称 |
METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD |
摘要 |
A method and apparatus for conditioning a polishing pad is described. The method includes steps of moving a cylindrical roller (202) having an abrasive substance affixed to it against a moving polishing pad (46). The roller may be actively rotated or reciprocated at variable rates, while maintaining a pressure against the polishing pad. The apparatus includes a cylindrical roller attached to one or more pressure application devices mechanically connected to the roller.
|
申请公布号 |
WO0149453(A1) |
申请公布日期 |
2001.07.12 |
申请号 |
WO2000US35457 |
申请日期 |
2000.12.28 |
申请人 |
LAM RESEARCH CORPORATION;FINKELMAN, ALEX |
发明人 |
FINKELMAN, ALEX |
分类号 |
B24B21/04;B24B37/04;B24B53/10;(IPC1-7):B24B37/04 |
主分类号 |
B24B21/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|