发明名称 Method for fabricating a repair fuse box for a semiconductor device
摘要 A method for fabricating a repair fuse box of a semiconductor device is disclosed. An etching stop polysilicon layer formed at a belt shape in edge portions of a repair fuse box is broken during a repair etching process without substantial departure from prior art methods for fabricating a repair fuse box of a semiconductor device. Thus, it is possible to improve repair yield of the semiconductor device.
申请公布号 US2001007794(A1) 申请公布日期 2001.07.12
申请号 US20010751847 申请日期 2001.01.02
申请人 KIM EUL RAK;SHIN JOONG SHIK 发明人 KIM EUL RAK;SHIN JOONG SHIK
分类号 H01L23/525;H01L27/108;(IPC1-7):H01L21/302 主分类号 H01L23/525
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