Procedure and device for acoustically detecting microparticles

摘要

A procedure for detecting microparticles released by at least one dispenser, encompassing the following steps: (a) triggering the dispenser over an oscillation target (20) with a sensor material (21), so that at least one microparticle hits the sensor material (21) and excites an acoustic wave, (b) detecting the acoustic wave with at least one oscillation sensor (31) connected with the sensor material (21), which emits an electrical sensor signal when the acoustic wave arrives, and (c) evaluating the sensor signal to determine the impact of the microparticle. The procedure is aimed at detecting the impact and/or impact positions of microparticles on a target. A detector for executing the procedure is also described.