| 摘要 |
PURPOSE: To provide a separating method and a separating apparatus for an article fixed to a pressure sensitive adhesive double coated sheet which can efficiently separate an article such as a very thin wafer or the like without breaking the article by use of a heat contractive pressure sensitive adhesive double coated sheet. CONSTITUTION: In separating the article B from a sticking unit C where the article B is fixed to a support plate A through the pressure sensitive adhesive double coated sheet 1 deformed by heat to exhibit a separating effect, at least a part of the outside of the sticking unit C is heated to first raise the temperature of at least a part of the outside area of the sticking unit and raise the temperature of the other area later, whereby the article B is separated from the pressure sensitive adhesive double coated sheet 1 from the outside area toward the other area. |
